Cut and paste this URL to share the unmodified register and value:
https://regviz.com/r/Silicon Labs/Series1/EFM32GG11B/EFM32GG11B520F2048GL120/LESENSE/CH9_TIMING#0x0
Scan Configuration
Set Excitation Time
Set Sample Delay
Set Measure Delay
https://github.com/cmsis-svd/cmsis-svd-data